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| Paper IPM / P / 12147 |
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Ag NPs with average particles size of 7 nm and with different accumulation on the carbon thin film are prepared by co-deposition of RF-Sputtering and RF-PECVD using acetylene gas and Ag target. Deposition was carried out at constant RF power of 160 Wand constant initial gas pressure of 0.04 mbar with different time deposition from 1 min up to 45 min. Localized Surface Plasmon Resonance (LSPR) peak of Ag NPS arrays are deconvoluted by four Lorentzian sub-peaks. These sub-peaks were attributed to dipolar Plasmon mode of isolated Ag NPs, coupling of dipolar Plasmon mode of Ag NPs in-plane (longitudinal polarization) and out-plane (perpendicular polarization) and quadrupolar Plasmon mode. The position, width and shape of LSPR peak were identified by position and relative ratio of these sub-peaks in UV-visible spectra. AFM results were utilized for deconvolution of LSPR peak and explanation of red-shifts or blue-shifts that was recorded by increasing of deposition time and variation Ag NPs morphology on the glass substrate. XRD profile indicates that Hexagonal supperlattice of Ag NPs were formed and confirms deconvolution results of LSPR peak and Ag NPs have fcc structure. This research is important for application of these Ag NPs arrays as biosensor chip.
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