“School of Particles”
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| Paper IPM / Particles / 9549 |
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| Abstract: | |||||||
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Langmuir probe measurements are performed in a cylindrical magnetron discharge for different ratios of argon and oxygen for various
pressures and magnetic fields. Discharge voltage and plasma potential are obtained as a function of pressure for three different values of
the magnetic fields in the absence of oxygen. The magnetic field impact on electron density has been measured too. Introducing oxygen
into the system, discharge voltage, plasma potential, electron density and temperature as a function of partial oxygen pressure in a fixed
magnetic field and constant pressure have been measured. It is shown that discharge voltage and plasma potential, are decreasing
functions of pressures as well as oxygen concentration, while electron temperature increases via introducing oxygen into the system. The
magnetic field gives rise to a decrease in discharge voltage and plasma potential.
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